WebAbstract: Silicon wafers polished on their front sides are individually placed on a susceptor in an epitaxy reactor and firstly pretreated under a hydrogen atmosphere, and secondly with addition of an etching medium with a flow rate of 1.5-5 slm to the hydrogen atmosphere, the hydrogen flow rate being 1-100 slm in both steps, and subsequently epitaxially coated on … WebView the profiles of people named Christian Hage. Join Facebook to connect with Christian Hage and others you may know. Facebook gives people the power...
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